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| 515. Peng Mao, Ren Jia, Li Wei, Ye Chenliang*, Zhang Jinli*, Revealing the role of Si vacancies and interfaces in SiHCl3 dissociation applied in polysilicon | |
| 发布时间： 2025-04-12 来源： | |
515. Peng Mao, Ren Jia, Li Wei, Ye Chenliang*, Zhang Jinli*, Revealing the role of Si vacancies and interfaces in SiHCl3 dissociation applied in polysilicon |
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| School of Chemical Engineering and Technology, Tianjin University, Yaguan Road 135, Jinnan District, Tianjin, 300350, P.R. China Tel: email:liwei@tju.edu.cn |